Name | TANTALUM SILICIDE |
Synonyms | silicon,tantalum Einecs 235-081-3 TANTALUM SILICIDE pentatantalum trisilicide Nickel Chromium (Ni-Cr) Alloy Sputtering Targets |
CAS | 12067-56-0 |
EINECS | 235-081-3 |
Molecular Formula | Si3Ta5 |
Molar Mass | 988.996 |
TSCA | Yes |
EPA chemical substance information | information is provided by: ofmpeb.epa.gov (external link) |